Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
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Item type | Current library | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|
Books | CUE LIBRARY | TR940 .I57 1994 (Browse shelf(Opens below)) | Available | 2019-0179 |
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Includes bibliographical references and index.
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
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