Introduction to microlithography /
Introduction to microlithography /
edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
- 2nd ed. Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
- Washington, DC : American Chemical Society, 1994.
- xiv, 527 p. : ill. ; 24 cm.
- ACS professional reference book .
Includes bibliographical references and index.
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
0841228485
Microlithography--Congresses.
Photoresists--Congresses.
Plasma etching--Congresses.
Semiconductors--Etching--Congresses.
TR940 / .I57 1994
Includes bibliographical references and index.
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
0841228485
Microlithography--Congresses.
Photoresists--Congresses.
Plasma etching--Congresses.
Semiconductors--Etching--Congresses.
TR940 / .I57 1994