Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
Material type:
TextSeries: ACS professional reference bookPublication details: Washington, DC : American Chemical Society, 1994. Edition: 2nd ed. Larry F. Thompson, C. Grant Willson, Murrae J. BowdenDescription: xiv, 527 p. : ill. ; 24 cmISBN: 0841228485Subject(s): Microlithography -- Congresses | Photoresists -- Congresses | Plasma etching -- Congresses | Semiconductors -- Etching -- CongressesLOC classification: TR940 | .I57 1994
Contents:
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
| Item type | Current library | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| Books | CUE LIBRARY | TR940 .I57 1994 (Browse shelf(Opens below)) | Available | 2019-0179 |
Includes bibliographical references and index.
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
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