MARC details
| 000 -LEADER |
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| fixed length control field |
01293nam a22002897a 4500 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20230821131220.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
230821b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
0841228485 |
| 040 ## - CATALOGING SOURCE |
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| Original cataloging agency |
CUE |
| Transcribing agency |
CUE |
| 050 ## - LIBRARY OF CONGRESS CALL NUMBER |
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| Classification number |
TR940 |
| Item number |
.I57 1994 |
| 245 ## - TITLE STATEMENT |
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| Title |
Introduction to microlithography / |
| Statement of responsibility, etc. |
edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden. |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| Remainder of edition statement |
Larry F. Thompson, C. Grant Willson, Murrae J. Bowden. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Washington, DC : |
| Name of publisher, distributor, etc. |
American Chemical Society, |
| Date of publication, distribution, etc. |
1994. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiv, 527 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 490 ## - SERIES STATEMENT |
|---|
| Series statement |
ACS professional reference book |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
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| Bibliography, etc. note |
Includes bibliographical references and index. |
| 505 ## - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microlithography |
| General subdivision |
Congresses. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Photoresists |
| General subdivision |
Congresses. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Plasma etching |
| General subdivision |
Congresses. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Etching |
| -- |
Congresses. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
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| Personal name |
Thompson, L. F., |
| Dates associated with a name |
1944- |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Willson, C. G. |
| Dates associated with a name |
1939- |
| Fuller form of name |
(C. Grant), |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Bowden, M. J., |
| Dates associated with a name |
1943- |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Library of Congress Classification |
| Koha item type |
Books |
| Classification part |
TR940 |
| Item part |
.I57 1994 |
| Suppress in OPAC |
No |