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Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden. by Thompson, L. F, 1944- | Willson, C. G. (C. Grant), 1939- | Bowden, M. J, 1943-. Series: ACS professional reference bookEdition: 2nd ed. Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.Material type:  Text; Format:
print
; Literary form:
Not fiction
Publication details: Washington, DC : American Chemical Society, 1994Availability: Items available for loan: CUE LIBRARY (1)Call number: TR940 .I57 1994.
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