TY  - BOOK
AU  - Thompson, L. F.,
AU  - Willson, C. G.
AU  - Bowden, M. J.,
TI  - Introduction to microlithography
T2  - ACS professional reference book
SN  - 0841228485
AV  - TR940 .I57 1994
PY  - 1994///
CY  - Washington, DC
PB  - American Chemical Society
KW  - Microlithography
KW  - Congresses
KW  - Photoresists
KW  - Plasma etching
KW  - Semiconductors
KW  - Etching
N1  - Includes bibliographical references and index; An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
ER  -